Automated reactive thermal evaporation system for transparent conductive coatings
| Dublin Core | PKP Metadata Items | Metadata for this Document | |
| 1. | Title | Title of document | Automated reactive thermal evaporation system for transparent conductive coatings |
| 2. | Creator | Author's name, affiliation, country | Miguel Fernandes; Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal |
| 2. | Creator | Author's name, affiliation, country | Yuri Y. Vygranenko; Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal |
| 2. | Creator | Author's name, affiliation, country | Manuela Vieira; Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal |
| 2. | Creator | Author's name, affiliation, country | Guilherme Lavareda; CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal Departamento de Ciência dos Materiais, Universidade Nova de Lisboa, Campus da Caparica, 2829-516 Caparica, Portugal |
| 2. | Creator | Author's name, affiliation, country | Carlos Nunes de Carvalho |
| 2. | Creator | Author's name, affiliation, country | Ana Amaral |
| 3. | Subject | Discipline(s) | Semiconductor Devices; Microelectronics; Optoelectronics |
| 3. | Subject | Keyword(s) | TCO, Solar cell, PLastic substrate |
| 4. | Description | Abstract | This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates. |
| 5. | Publisher | Organizing agency, location | ISEL - High Institute of Engineering of Lisbon |
| 6. | Contributor | Sponsor(s) | |
| 7. | Date | (YYYY-MM-DD) | 2017-10-26 |
| 8. | Type | Status & genre | Peer-reviewed Article |
| 8. | Type | Type | |
| 9. | Format | File format | |
| 10. | Identifier | Uniform Resource Identifier | http://journals.isel.pt/index.php/i-ETC/article/view/36 |
| 11. | Source | Title; vol., no. (year) | i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A) |
| 12. | Language | English=en | en |
| 13. | Relation | Supp. Files | |
| 14. | Coverage | Geo-spatial location, chronological period, research sample (gender, age, etc.) | |
| 15. | Rights | Copyright and permissions |
Copyright (c) 2017 Miguel Fernandes This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License. |