Automated reactive thermal evaporation system for transparent conductive coatings

Miguel Fernandes, Yuri Y. Vygranenko, Manuela Vieira, Guilherme Lavareda, Carlos Nunes de Carvalho, Ana Amaral


This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.


TCO, Solar cell, PLastic substrate

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Cheng C, Wagner S., Overview of flexible electronics technology. In: Wong,WS, Salleo A. editors. Flexible Electronics: Materials and Applications, New York: Springer; 2009. p. 1–28.

MacDonald MK, Looney et al. Latest advances in substrates for flexible electronics. Journal of the SID 2007;15(12): 1075.

Tseng K-S, Lo Y-L. Effect of sputtering parameters on optical and electrical properties of ITO films on PET substrates. Appl. Surf. Sci. 2013; 285-157.

Kim D-H et al. Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering. Appl. Surf. Sci. 2006; 253 - 409.

Meng Y, et al. Molybdenum-doped indium oxide transparent conductive thin films, J. Vac. Sci. Technol. A 2002; 20-288.

Niino F, Hirasawa H, Kondo K. Deposition of low-resistivity ITO on plastic substrates by DC arc-discharge ion plating. Thin Solid Films 2002; 411-28.

Behzad Razavi and Bruce A. Wooley, “A 12-b 5-Msample/s Two-Step CMOS A/D Converter,” IEEE J. Solid-State Circuits, vol. 27, no. 12, Dec. 1992, pp. 1667-1678.

Frank G, Kauer E, Köstlin H, Schmitte FJ, Transparent heat-reflecting coatings for solar applications based on highly doped tin oxide and indium oxide, Solar Energy Materials 1983;8:4-387.

Lavareda G, Nunes de Carvalho C, Fortunato E, Ramos AR, Alves E, Conde O, Amaral A, Transparent thin film transistors based on indium oxide semiconductor, J Non-Crystalline Solids 2006; 352-2311.



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